[G-1-5L] Improved Leakage Current for TiO₂-Based MIM Capacitors by Embedding Ge Nanocrystals

Y.-H. Chen¹、M.-T. Yu¹、C.-C. Lin¹、Y.-H. Wu¹ (1.Natl. Tsing Hua Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2014.G-1-5L