[G-2-1] Stress Distribution Pattern in Cross-Sectional 3D-LSI Examined by u-XRD

M. Mariappan¹, J.C. Bea¹, T. Fukushima¹, K.W. Lee¹, M. Koyanagi¹ (1.Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.G-2-1