[J-2-2] Improvement of S-factor Method for Evaluation of MOS Interface State Density W.–L. Cai1,2, M. Takenaka1,2, S. Takagi1,2 (1.Univ. of Tokyo, 2.JST-CREST (Japan)) https://doi.org/10.7567/SSDM.2014.J-2-2