The Japan Society of Applied Physics

[J-3-1] A 16nm FinFET CMOS Technology for Mobile SoC and Computing Applications

S.–Y. Wu1、C.Y. Lin1、M.C. Chiang1、J.J. Liaw1、J.Y. Cheng1、S.H. Yang1、C.H. Yao1、T.L. Lee1、W. Chang1、C.C. Chen1、M.H. Tsai1、S.M. Jang1、K.S. Chen1、Y. Ku1 (1.Taiwan Semiconductor Manufacturing Company (Taiwan))

https://doi.org/10.7567/SSDM.2014.J-3-1