A 16nm FinFET CMOS Technology for Mobile SoC and Computing Applications

S.–Y. Wu; C.Y. Lin; M.C. Chiang; J.J. Liaw; J.Y. Cheng; S.H. Yang; C.H. Yao; T.L. Lee; W. Chang; C.C. Chen; M.H. Tsai; S.M. Jang; K.S. Chen; Y. Ku

doi:https://doi.org/10.7567/SSDM.2014.J-3-1

2014 International Conference on Solid State Devices and Materials

Sep 8, 2014 - Sep 11, 2014
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[J-3-1] A 16nm FinFET CMOS Technology for Mobile SoC and Computing Applications

S.–Y. Wu¹, C.Y. Lin¹, M.C. Chiang¹, J.J. Liaw¹, J.Y. Cheng¹, S.H. Yang¹, C.H. Yao¹, T.L. Lee¹, W. Chang¹, C.C. Chen¹, M.H. Tsai¹, S.M. Jang¹, K.S. Chen¹, Y. Ku¹ (1.Taiwan Semiconductor Manufacturing Company (Taiwan))

https://doi.org/10.7567/SSDM.2014.J-3-1

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