[M-9-2] A Platform for Backside Illuminated CMOS Image Sensors for UV and Visible Applications

B. Vereecke¹、C. Cavaco¹、K. De Muynck¹、L. Haspeslagh¹、K. Minoglou¹、D. Sabuncuoglu¹、K. Tack¹、H. Osman¹ (1.imec (Belgium))

https://doi.org/10.7567/SSDM.2014.M-9-2