[M-9-2] A Platform for Backside Illuminated CMOS Image Sensors for UV and Visible Applications
B. Vereecke1, C. Cavaco1, K. De Muynck1, L. Haspeslagh1, K. Minoglou1, D. Sabuncuoglu1, K. Tack1, H. Osman1
(1.imec (Belgium))
https://doi.org/10.7567/SSDM.2014.M-9-2