The Japan Society of Applied Physics

[M-9-2] A Platform for Backside Illuminated CMOS Image Sensors for UV and Visible Applications

B. Vereecke1, C. Cavaco1, K. De Muynck1, L. Haspeslagh1, K. Minoglou1, D. Sabuncuoglu1, K. Tack1, H. Osman1 (1.imec (Belgium))

https://doi.org/10.7567/SSDM.2014.M-9-2