[M-9-3] A Micro-Machined IR Thermal Detector Using Torsional Oscillation: Improvement of Resonator Profile for High Sensitivity

J.H. Jeong¹, S. Kumagai^1,3, I. Yamashita^2,3, Y. Uraoka^2,3, M. Sasaki^1,3 (1.Toyota Tech. Inst., 2.NAIST, 3.CREST-JST (Japan))

https://doi.org/10.7567/SSDM.2014.M-9-3