[M-9-3] A Micro-Machined IR Thermal Detector Using Torsional Oscillation: Improvement of Resonator Profile for High Sensitivity

J.H. Jeong¹、S. Kumagai^1,3、I. Yamashita^2,3、Y. Uraoka^2,3、M. Sasaki^1,3 (1.Toyota Tech. Inst.、2.NAIST、3.CREST-JST (Japan))

https://doi.org/10.7567/SSDM.2014.M-9-3