Wafer Scale Fabrication of Transistors using CVD-Grown Graphene and its Application to Inverter Circuit

S. Nakaharai; T. Iijima; S. Ogawa; K. Yagi; N. Harada; K. Hayashi; D. Kondo; M. Takahashi; S.L. Li; K. Tsukagoshi; S. Sato; N. Yokoyama

doi:https://doi.org/10.7567/SSDM.2014.P-7-3

2014 International Conference on Solid State Devices and Materials

Sep 8, 2014 - Sep 11, 2014
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-7-3] Wafer Scale Fabrication of Transistors using CVD-Grown Graphene and its Application to Inverter Circuit

S. Nakaharai^1,2, T. Iijima², S. Ogawa², K. Yagi², N. Harada², K. Hayashi², D. Kondo², M. Takahashi², S.L. Li¹, K. Tsukagoshi¹, S. Sato², N. Yokoyama² (1.NIMS, 2.AIST (Japan))

https://doi.org/10.7567/SSDM.2014.P-7-3

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