The Japan Society of Applied Physics

[PS-1-12L] Fabrication of High Performance Single-Crystalline Silicon Thin Film Transistors on a Polyethylene Terephthalate Substrate

K. Sakaike1、M. Akazawa1、A. Nakagawa1、S. Higashi1,2 (1.Dept. of Semiconductor Electronics and Integration Science, Graduate School of Advanced Sciences of Matter, Hiroshima Univ.、2.Research Inst. for Nanodevice and Bio Systems, Hiroshima Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-1-12L