Fabrication of High Performance Single-Crystalline Silicon Thin Film Transistors on a Polyethylene Terephthalate Substrate

K. Sakaike; M. Akazawa; A. Nakagawa; S. Higashi

doi:https://doi.org/10.7567/SSDM.2014.PS-1-12L

[PS-1-12L] Fabrication of High Performance Single-Crystalline Silicon Thin Film Transistors on a Polyethylene Terephthalate Substrate

K. Sakaike¹、M. Akazawa¹、A. Nakagawa¹、S. Higashi^1,2 (1.Dept. of Semiconductor Electronics and Integration Science, Graduate School of Advanced Sciences of Matter, Hiroshima Univ.、2.Research Inst. for Nanodevice and Bio Systems, Hiroshima Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-1-12L

2014 International Conference on Solid State Devices and Materials

[PS-1-12L] Fabrication of High Performance Single-Crystalline Silicon Thin Film Transistors on a Polyethylene Terephthalate Substrate