[PS-10-1] Measurement and Analysis of Annealing Effect on Parylene Dielectric Transistor

R. Shidachi¹, N. Take¹, L. Philida¹, T. Tokuhara¹, T. Yokota^1,2, T. Sekitani^1,2,3, T. Someya^1,2 (1.Univ. of Tokyo, 2.JST, 3.Osaka Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-10-1