[PS-10-1] Measurement and Analysis of Annealing Effect on Parylene Dielectric Transistor

R. Shidachi¹、N. Take¹、L. Philida¹、T. Tokuhara¹、T. Yokota^1,2、T. Sekitani^1,2,3、T. Someya^1,2 (1.Univ. of Tokyo、2.JST、3.Osaka Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-10-1