The Japan Society of Applied Physics

[PS-10-1] Measurement and Analysis of Annealing Effect on Parylene Dielectric Transistor

R. Shidachi1, N. Take1, L. Philida1, T. Tokuhara1, T. Yokota1,2, T. Sekitani1,2,3, T. Someya1,2 (1.Univ. of Tokyo, 2.JST, 3.Osaka Univ. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-10-1