The Japan Society of Applied Physics

[PS-14-14L] Quantitative characterization of border traps with widely-spread time constants in SiC MOS capacitors by transient capacitance measurements

Y. Fujino1, R.H. Kikuchi1, H. Hirai1, K. Kita1,2 (1.The Univ. of Tokyo, 2.JST-PRESTO (Japan))

https://doi.org/10.7567/SSDM.2014.PS-14-14L