The Japan Society of Applied Physics

[PS-3-7] Electrical Characteristics of Novel Junctionless FinFET Utilizing Trench Structure for Extreme Scaling

M.–S. Yeh1, Y.–C. Wu1, M.–H. Wu1, Y.–R. Jhan1, M.–H. Chung1 (1.National Tsing Hua Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2014.PS-3-7