[PS-3-9] High Performance Germanium n⁺/p Shallow Junction for the Scaled nMOSFET

C. Wang¹, C. Li¹, W. Huang¹, S.Y. Chen¹, H.K. Lai¹ (1.Semicond. Photonics Res. Center, Xiamen Univ. (China))

https://doi.org/10.7567/SSDM.2014.PS-3-9