[PS-6-12] Characteristics of Submicron Indium-Tin-Oxide Thin-Film Transistors Fabricated by Film Profile Engineering

Y.A. Huang¹, H.C. Lin^1,2, T.Y. Huang¹ (1.NCTU, 2.National Nano Device Labs. (Taiwan))

https://doi.org/10.7567/SSDM.2014.PS-6-12