Effects of Annealing on In-Ga-Zn-Oxide Films

K. Okazaki; H. Kanemura; Y. Hosaka; T. Obonai; M. Oota; M. Takahashi; S. Nishino; S. Yamazaki

doi:https://doi.org/10.7567/SSDM.2014.PS-8-10

2014 International Conference on Solid State Devices and Materials

Sep 8, 2014 - Sep 11, 2014
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[PS-8-10] Effects of Annealing on In-Ga-Zn-Oxide Films

K. Okazaki¹, H. Kanemura¹, Y. Hosaka¹, T. Obonai¹, M. Oota², M. Takahashi², S. Nishino², S. Yamazaki² (1.Advanced Film Device Inc., 2.Semiconductor Energy Lab. Co., Ltd. (Japan))

https://doi.org/10.7567/SSDM.2014.PS-8-10

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