The Japan Society of Applied Physics

11:00 〜 11:15

[A-7-2] Waveguide InGaAs Metal-semiconductor-metal Photodetector Monolithically Integrated with InP Grating Coupler on III-V CMOS Photonics Platform

Y. P. Cheng1, 2, Y. Ikku1, 2, M. Takenaka1, 2, S. Takagi1, 2 (1.Univ. of Tokyo, 2.JST-CREST(Japan))

https://doi.org/10.7567/SSDM.2015.A-7-2