12:15 〜 12:35

[E-7-5] Analysis and Reduction of Leakage Current of 2kV Monolithic Isolator with Wide Trench Spiral Isolation Structure

^○Y. Takeuchi¹, R. Kuroda¹, S. Sugawa¹ (1.Tohoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2015.E-7-5