Enhancement of Au Induced Lateral Crystallization in Electron Irradiated Amorphous Ge on SiO<sub>2</sub>

K. Moto

doi:https://doi.org/10.7567/SSDM.2015.G-5-5

6:25 PM - 6:40 PM

[G-5-5] Enhancement of Au Induced Lateral Crystallization in Electron Irradiated Amorphous Ge on SiO₂

^○K. Moto¹, S. Sakiyama¹, H. Okamoto¹, H. Hara², H. Nishimura², K. Takakura¹, I. Tsunoda¹ (1.National Inst. of Tech., Kumamoto College, 2.Bruker BioSpin K.K.(Japan))

https://doi.org/10.7567/SSDM.2015.G-5-5

2015 International Conference on Solid State Devices and Materials

[G-5-5] Enhancement of Au Induced Lateral Crystallization in Electron Irradiated Amorphous Ge on SiO2

[G-5-5] Enhancement of Au Induced Lateral Crystallization in Electron Irradiated Amorphous Ge on SiO₂