Enhancement of Au Induced Lateral Crystallization in Electron Irradiated Amorphous Ge on SiO<sub>2</sub>

K. Moto

doi:https://doi.org/10.7567/SSDM.2015.G-5-5

2015 International Conference on Solid State Devices and Materials

2015年9月27日〜 2015年9月30日
Sapporo Convention Center, Sapporo, Japan

18:25 〜 18:40

[G-5-5] Enhancement of Au Induced Lateral Crystallization in Electron Irradiated Amorphous Ge on SiO₂

^○K. Moto¹, S. Sakiyama¹, H. Okamoto¹, H. Hara², H. Nishimura², K. Takakura¹, I. Tsunoda¹ (1.National Inst. of Tech., Kumamoto College, 2.Bruker BioSpin K.K.(Japan))

https://doi.org/10.7567/SSDM.2015.G-5-5

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2015 International Conference on Solid State Devices and Materials

[G-5-5] Enhancement of Au Induced Lateral Crystallization in Electron Irradiated Amorphous Ge on SiO2

[G-5-5] Enhancement of Au Induced Lateral Crystallization in Electron Irradiated Amorphous Ge on SiO₂