16:35 〜 16:50

[M-2-2L] Highly Reduced Current Collapse in AlGaN/GaN HEMTs by Combined Application of Oxygen Plasma Treatment and Field-plate Structures

^○J. Asubar¹, S. Yoshida¹, H. Tokuda¹, M. Kuzuhara¹ (1.Univ. of Fukui(Japan))

https://doi.org/10.7567/SSDM.2015.M-2-2L