The Japan Society of Applied Physics

2015 International Conference on Solid State Devices and Materials

2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

4:05 PM - 4:25 PM

[N-2-1] Optimization of Extension Doping Condition of FinFETs for Ultra-Low-Power Applications

○T. Matsukawa1, Y. X. Liu1, T. Mori1, Y. Morita1, S. O'uchi1, H. Fuketa1, S. Otsuka1, S. Migita1, M. Masahara1 (1.AIST(Japan))

https://doi.org/10.7567/SSDM.2015.N-2-1