16:40 〜 17:00

[N-4-4] Thermodynamic Knob for High Performance SiGe Gate Stack Formation

^○C. T. Chang¹, T. Nishimura¹, A. Toriumi¹ (1.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2015.N-4-4