First Demonstration of 300mm InGaAs-On-Insulator Substrates Fabricated using the Smart Cut<sup>TM</sup> Technology

J. Widiez

doi:https://doi.org/10.7567/SSDM.2015.N-5-3

18:15 〜 18:35

[N-5-3] First Demonstration of 300mm InGaAs-On-Insulator Substrates Fabricated using the Smart Cut^TM Technology

^○J. Widiez^1,2, S. Sollier^1,2, T. Baron^1,3, M. Martin^1,3, G. Gaudin⁴, F. Mazen^1,2, F. Madeira^1,2, S. Favier^1,2, A. Salaun^1,2, S. Arnaud^1,3, S. David^1,3, E. Beche^1,2, GrampeixH. ^1,2, C. Veytizou⁴, D. Delprat⁴, T. Signamarcheix^1,2 (1.Univ. Grenoble Alpes, 2.CEA-LETI, 3.CNRS-LTM, 4.SOITEC(France))

https://doi.org/10.7567/SSDM.2015.N-5-3

2015 International Conference on Solid State Devices and Materials

[N-5-3] First Demonstration of 300mm InGaAs-On-Insulator Substrates Fabricated using the Smart CutTM Technology

[N-5-3] First Demonstration of 300mm InGaAs-On-Insulator Substrates Fabricated using the Smart Cut^TM Technology