[PS-14-11] Mapping of Si/SiC Hetero p-n Junctions Using Scanning Internal Photoemission Microscopy

^○M. Shingo¹, J. Liang², N. Shigekawa², M. Arai³, K. Shiojima¹ (1.Univ. of Fukui, 2.Osaka City Univ., 3.New Japan Radio Co., Ltd.(Japan))

https://doi.org/10.7567/SSDM.2015.PS-14-11