Discrete Dopant Impact on the 7 nm Nanowire Transistor Performance

X. Wang

doi:https://doi.org/10.7567/SSDM.2015.PS-3-1

2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

[PS-3-1] Discrete Dopant Impact on the 7 nm Nanowire Transistor Performance

^○X. Wang¹, Y. Wang², C. Riddet³, E. Towie³, B. Cheng³, X. Liu², A. Asenov^1,3 (1.Univ. of Glasgow, 2.Peking Univ., 3.Gold Standard Simulations Ltd.(UK))

https://doi.org/10.7567/SSDM.2015.PS-3-1

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