Enhancement Mode AlGaN/GaN MIS-HEMTs Using Multilayer HfO2/La2O3 Gate Insulator for High Power Application

Y. X. Huang

doi:https://doi.org/10.7567/SSDM.2015.PS-6-2

[PS-6-2] Enhancement Mode AlGaN/GaN MIS-HEMTs Using Multilayer HfO₂/La₂O₃ Gate Insulator for High Power Application

Y. X. Huang¹, W. C. Shih¹, T. W. Lin¹, ^○C. H. Wu¹, Y. C. Lin¹, J. S. Maa¹, E. Y. Chang¹, K. Kakushima², H. Iwai² (1.National Chiao Tung Univ., 2.Tokyo Tech(Taiwan))

https://doi.org/10.7567/SSDM.2015.PS-6-2

2015 International Conference on Solid State Devices and Materials

[PS-6-2] Enhancement Mode AlGaN/GaN MIS-HEMTs Using Multilayer HfO2/La2O3 Gate Insulator for High Power Application

[PS-6-2] Enhancement Mode AlGaN/GaN MIS-HEMTs Using Multilayer HfO₂/La₂O₃ Gate Insulator for High Power Application