The Japan Society of Applied Physics

[PS-1-11] PtGe-Source/Drain Ge p-MOSFET with High On/Off Ratio and Low Parasitic Resistance

S. Tanaka1, Y. Nagatomi1, Y. Nagaoka1, K. Yamamoto1, D. Wang1, H. Nakashima1 (1.Kyushu Univ.(Japan))