[PS-6-7] Study of AlGaN/GaN Tri-Gate HEMTs for Device Performance Improvement ○C. C. Liu1, Y. X. Huang1, W. C. Shih1, H. H. Hsu1, Y. C. Lin1, J. S. Maa1, E. Y. Chang1, H. Iwai2 (1.National Chiao Tung Univ., 2.Tokyo Tech(Taiwan))