2:00 PM - 2:20 PM

[B-1-02] Gate Contact RRAM in Nano-scaled FinFET Logic Technologies

^○M. Y. Hsu¹, Y. D. Chih², C. J. Lin¹, Y. C. King¹ (1.National Tsing Hua Univ.(Taiwan), 2.TSMC(Taiwan))

https://doi.org/10.7567/SSDM.2016.B-1-02