10:30 〜 10:45

[C-3-04] Waveguide-Integrated Vertical pin Photodiodes of Ge Fabricated on p⁺ and n⁺ Si-on-Insulator Layers

^○K. Ito¹, Y. Ishikawa¹ (1.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2016.C-3-04