14:00 〜 14:20

[K-1-02] Evaluation of Depth-dependent TSV-liner Interface States Using Multi-well Structured TSV and Charge Pumping Technique

^○Y. Sugawara¹, H. Kino¹, T. Fukushima¹, K. Lee¹, M. Koyanagi¹, T. Tanaka¹ (1.Tohoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.K-1-02