14:20 〜 14:40 [K-1-03] Superiority of In-Stack Decoupling Capacitor for 3D-LSI with Wide I/O Data Bus ○Y. Araga1, M. Nagata2, N. Miura2, H. Ikeda2, K. Kikuchi1 (1.AIST(Japan), 2.Kobe Univ.(Japan)) https://doi.org/10.7567/SSDM.2016.K-1-03