4:30 PM - 4:50 PM

[K-2-03] The Effect of the HfN_x Barrier Thickness on the Cu Grain Orientation Control

^○M. Sato¹, E. Aoyagi², M. B. Takeyama¹ (1.Kitami Inst. of Tech.(Japan), 2.Tohoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.K-2-03