2016 International Conference on Solid State Devices and Materials
Sep 26, 2016 - Sep 29, 2016 Tsukuba International Congress Center, Tsukuba, Japan
10:20 AM - 10:40 AM
[K-3-03] A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology
○D. Yamane1, T. Konishi2, T. Safu2, H. Toshiyoshi3, M. Sone1, K. Masu1, K. Machida2 (1.Tokyo Tech(Japan), 2.NTT Advanced Tech. Corp.(Japan), 3.Univ. of Tokyo(Japan))
