The Japan Society of Applied Physics

10:20 〜 10:40

[K-3-03] A Spring Design for Tri-axis MEMS Accelerometer by Multi-layer Metal Technology

D. Yamane1, T. Konishi2, T. Safu2, H. Toshiyoshi3, M. Sone1, K. Masu1, K. Machida2 (1.Tokyo Tech(Japan), 2.NTT Advanced Tech. Corp.(Japan), 3.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2016.K-3-03