Impact of Rapid Cooling Process in Ultra-high-temperature Oxidation of 4H-SiC(0001)

M. Sometani

doi:https://doi.org/10.7567/SSDM.2016.N-6-05L

2016 International Conference on Solid State Devices and Materials

Sep 26, 2016 - Sep 29, 2016
Tsukuba International Congress Center, Tsukuba, Japan

12:30 PM - 12:45 PM

[N-6-05(Late News)] Impact of Rapid Cooling Process in Ultra-high-temperature Oxidation of 4H-SiC(0001)

^○M. Sometani^1,2, D. Nagai¹, T. Hosoi¹, T. Shimura¹, Y. Yonezawa², M. Takei³, H. Watanabe¹ (1.Osaka Univ.(Japan), 2.AIST(Japan), 3.Fuji Electric Co., Ltd(Japan))

https://doi.org/10.7567/SSDM.2016.N-6-05L

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