The Japan Society of Applied Physics

13:30 〜 14:00

[O-1-01(Invited)] Si-passivated Ge nFET towards a reliable Ge CMOS

H. Arimura1, S. Sioncke1, D. Cott1, J. Mitard1, W. Vanherle1, R. Loo1, J. Franco1, T. Conard1, P. Favia1, H. Bender1, L. Witters1, H. Mertens1, L. -Å. Ragnarsson1, G. Pourtois1, M. Heyns1, A. Mocuta1, A. V. -Y. Thean1, D. Mocuta1, N. Collaert1 (1.imec(Belgium))

https://doi.org/10.7567/SSDM.2016.O-1-01