10:00 〜 10:20

[O-3-02] Thickness-Defined Poly-Si FinFETs (TD-FinFFTs) with 5nm Fin-Width and Performance Enhancement by Local Strain Boost Technique

^○J. -Y. Lin¹, T. S. Chao¹ (1.NCTU(Taiwan))

https://doi.org/10.7567/SSDM.2016.O-3-02