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[PS-1-01] Structural and Electrical Characterization of Epitaxial Ge Thin Film on Si (001) Formed by Sputtering

^○S. Otsuka¹, T. Mori¹, Y. Morita¹, N. Uchida¹, Y. Liu¹, S. O’uchi¹, H. Fuketa¹, S. Migita¹, M. Masahara¹, T. Matsukawa¹ (1.AIST(Japan))

https://doi.org/10.7567/SSDM.2016.PS-1-01