The Japan Society of Applied Physics

15:00 〜 17:00

[PS-1-06] Influence of Low Thermal Budget Plasma Oxidation and Millisecond Laser Anneal on Gate Stack Reliability in view of 3D Sequential Integration

C. -M. V. Lu1,2, C. Fenouillet-Béranger1, R. Gassilloud1, H. Graoui3, D. Larmagnac4, S. Sharma3, X. Garros1, C. Leroux1, A. Toffoli1, G. Romano1,2, R. Kies1, N. Rambal1, M. -P. Samson2, B. Previtali1, C. Guedj1, N. Bernier1, S. Kerdiles1, L. Brunet1, P. Batude1, T. Skotnicki2, M. Vinet1 (1.CEA-LETI(France), 2.STMicroelectronics(France), 3.Applied Materials Inc.(USA), 4.Applied Materials France(France))

https://doi.org/10.7567/SSDM.2016.PS-1-06