3:00 PM - 5:00 PM

[PS-1-08] Enhanced Electrical and Reliability Characteristics in Ge p-MOSFETs by In-situ Plasma Treatments and Capping Hf/Zr on Interfacial Layers

^○T. Huang¹, C. Hsu¹, K. S. Chang-Liao¹, Y. Hsu¹, C. Huang¹, Y. Li¹ (1.National Tsing Hua Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2016.PS-1-08