The Japan Society of Applied Physics

15:00 〜 17:00

[PS-2-01] A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System

T. Konishi1, D. Yamane2, H. Ito2, S. Dosho2, N. Ishihara2, H. Toshiyoshi3, K. Masu2, K. Machida1 (1.NTT Advanced Tech. Corp.(Japan), 2.Tokyo Tech(Japan), 3.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2016.PS-2-5-01