A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System

T. Konishi

doi:https://doi.org/10.7567/SSDM.2016.PS-2-5-01

3:00 PM - 5:00 PM

[PS-2-01] A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System

^○T. Konishi¹, D. Yamane², H. Ito², S. Dosho², N. Ishihara², H. Toshiyoshi³, K. Masu², K. Machida¹ (1.NTT Advanced Tech. Corp.(Japan), 2.Tokyo Tech(Japan), 3.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2016.PS-2-5-01

2016 International Conference on Solid State Devices and Materials

[PS-2-01] A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System