A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System

T. Konishi

doi:https://doi.org/10.7567/SSDM.2016.PS-2-5-01

2016 International Conference on Solid State Devices and Materials

2016年9月26日〜 2016年9月29日
Tsukuba International Congress Center, Tsukuba, Japan

15:00 〜 17:00

[PS-2-01] A Novel Noise Analysis Method with Multi-physics Simulation for Capacitive CMOS-MEMS Inertial Sensor System

^○T. Konishi¹, D. Yamane², H. Ito², S. Dosho², N. Ishihara², H. Toshiyoshi³, K. Masu², K. Machida¹ (1.NTT Advanced Tech. Corp.(Japan), 2.Tokyo Tech(Japan), 3.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2016.PS-2-5-01

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