Poly-InSb nMOSFETs for Monolithic 3DIC

M. Takahashi

2016 International Conference on Solid State Devices and Materials

Sep 26, 2016 - Sep 29, 2016
Tsukuba International Congress Center, Tsukuba, Japan

11:15 AM - 11:18 AM

[PS-2-06] Poly-InSb nMOSFETs for Monolithic 3DIC

^○M. Takahashi^1,2, T. Irisawa², W. H. Chang², J. Tominaga², S. Fujikawa¹, H. Fujishiro¹, T. Maeda^1,2 (1.Tokyo Univ. of Science(Japan), 2.AIST(Japan))

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